PECVD grown DBR for microcavity OLED sensorBohlen, Brandon (2007) PECVD grown DBR for microcavity OLED sensor. Masters thesis, Iowa State University. This is the latest version of this eprint. Full text available as:
AbstractThe use of OLEDs as the light source in a photoluminescent sensor was studied for the detection of various chemicals. Controlling the bandwidth of light emitted by the OLED could increase the sensitivity of these sensors. Building the OLEDs in a microcavity structure allows the bandwidth and peak frequency of light being emitted to be controlled and adjusted. A key component of a microcavity is a partially transmitting reflector. A dielectric mirror can be manufactured with varying reflectance and integrated into the OLED. The dielectric mirror created for this project is a distributed Bragg reflector (DBR) made of alternating silicon nitride and silicon dioxide layers grown with plasma-enhanced chemical vapor deposition (PECVD). A repeatable method for the manufacture of DBRs was designed. Three DBRs were grown on glass slides and measured with a spectrophotometer. The slides had reflectance of 75-85% with bandwidths of 170-180nm centered around 570-590nm.
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