PECVD grown DBR for microcavity OLED sensor
Bohlen, Brandon (2007) PECVD grown DBR for microcavity OLED sensor. Masters thesis, Iowa State University.
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The use of OLEDs as the light source in a photoluminescent sensor was studied for the detection of various chemicals. Controlling the bandwidth of light emitted by the OLED could increase the sensitivity of these sensors. Building the OLEDs in a microcavity structure allows the bandwidth and peak frequency of light being emitted to be controlled and adjusted. A key component of a microcavity is a partially transmitting reflector. A dielectric mirror can be manufactured with varying reflectance and integrated into the OLED. The dielectric mirror created for this project is a distributed Bragg reflector (DBR) made of alternating silicon nitride and silicon dioxide layers grown with plasma-enhanced chemical vapor deposition (PECVD). A repeatable method for the manufacture of DBRs was designed. Three DBRs were grown on glass slides and measured with a spectrophotometer. The slides had reflectance of 75-85% with bandwidths of 170-180nm centered around 570-590nm.
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