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PECVD grown DBR for microcavity OLED sensor

Bohlen, Brandon (2007) PECVD grown DBR for microcavity OLED sensor. Masters thesis, Iowa State University.

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The use of OLEDs as the light source in a photoluminescent sensor was studied for the detection of various chemicals. Controlling the bandwidth of light emitted by the OLED could increase the sensitivity of these sensors. Building the OLEDs in a microcavity structure allows the bandwidth and peak frequency of light being emitted to be controlled and adjusted. A key component of a microcavity is a partially transmitting reflector. A dielectric mirror can be manufactured with varying reflectance and integrated into the OLED. The dielectric mirror created for this project is a distributed Bragg reflector (DBR) made of alternating silicon nitride and silicon dioxide layers grown with plasma-enhanced chemical vapor deposition (PECVD). A repeatable method for the manufacture of DBRs was designed. Three DBRs were grown on glass slides and measured with a spectrophotometer. The slides had reflectance of 75-85% with bandwidths of 170-180nm centered around 570-590nm.

EPrint Type:Thesis (Masters)
Uncontrolled Keywords:distributed Bragg reflector DBR microcavity organic light emitting light-emitting diode device OLED plasma enhanced plasma-enhanced chemical vapor deposition PECVD brandon bohlen thesis
Subjects:Electrical Engineering > MICROELECTRONICS & PHOTONICS > Thin Film Transistors and Sensors
Electrical Engineering > MICROELECTRONICS & PHOTONICS > Semiconductor Materials & Devices Processing
Electrical Engineering > MICROELECTRONICS & PHOTONICS > Photonics
ID Code:405
Identification Number:Identification Number UNSPECIFIED
Deposited By:Brandon Bohlen
Deposited On:29 November 2007

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