ISU Electrical and Computer Engineering Archives

Ultrafast laser deposition and microfabrication of thin films for MEMS structures

Vendan, Monica (2006) Ultrafast laser deposition and microfabrication of thin films for MEMS structures. Masters thesis, Iowa State University.

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Abstract

This thesis is organized into a chapter on literature review, three papers and a chapter on conclusions. The first paper deals with the femtosecond pulsed laser deposition and fabrication of micromotor on Teflon thin films along with a comparison of the traditional excimer deposition. The second paper deals with the femtosecond pulsed laser deposition and fabrication of microgripper on 3C-SiC along with a comparison of films deposited by excimer laser and atmospheric chemical vapor deposition methods. The third paper deals with the details of fabrication of a microgripper on 3C-SiC thin film.

EPrint Type:Thesis (Masters)
Uncontrolled Keywords:PLD, MEMS, Femtosecond laser, Microgripper
Subjects:Electrical Engineering > MICROELECTRONICS & PHOTONICS > Semiconductor Materials & Devices Processing
ID Code:251
Identification Number:TR-2006-05-03
Deposited By:Monica Vendan
Deposited On:23 May 2006

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